KSL-91-35 + redirect page
Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment + Has identifier
Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment + Ksl tr id
Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment + Number
| Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment |
Bibtype
techreport
Has publishing details
December,1991
Has title
Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment
Has where published
KSL-91-35
Has year
1991
Title
Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment
Year
1991
Abstract
This paper describes efforts to apply AI m … This paper describes efforts to apply AI methods to enhance the quality and efficiency of semiconductor manufacturing in a state-of-the-art fabrication device called the "rapid thermal multiprocessor(RTM)". Semiconductor fabrication involves many complex processing steps with limited opportunities for measurement of process and product properties. By applying more knowledge to that limited data, AI monitoring and control methods augment classical control methods through detection of abnormalities and trends, prediction of failures, diagnosis, planning of corrective action sequences, explanation of diagnoses or predictions, and reaction to anomalous conditions that classical control systems typically would not correct. An architecture for AI control is described that adapts to complex changing environments such as that foundin fabrication facilities. We illustrate architectural capabilities and our research efforts directed at reasoning about physical components of the RTM with scenarios from RTM wafer fabrication as well as from our parallel effort in monitoring intensive care patients. ort in monitoring intensive care patients.
Author
Janet Leeann Murdock and Barbara Hayes-Roth +
Has author
Janet Leeann Murdock and Barbara Hayes-Roth +
Has identifier
Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment +
Institution
Knowledge Systems, AI Laboratory +
Ksl tr id
Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment +
Month
December +
Number
Intelligent Monitoring and Control of Semiconductor Manufacturing Equipment +
Process note
YES +
Categories KSL Technical Report +, Publication +, Technical Report +
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